step and scan projection aligner是什么意思
中文翻译步进扫描投影对准曝光器网络释义
1)step and scan projection aligner,步进扫描投影对准曝光器2)scanning projection aligner,扫描型投影对准曝光器3)stepping projection aligner,步进式投影对准曝光器4)projection aligner,投影对准曝光器5)scanning projection printing,扫描式投影曝光6)step-and-scan lithography,步进扫描投影光刻用法例句
Exposure dose control for step-and-scan lithography;
步进扫描投影光刻机中的曝光剂量控制技术研究